Electronics industry production equipment

Content:
95 电子工业生产设备综合
96 表面防护设备
97 加工专用设备
98 检验专用设备
99 其他生产设备

L95 GB/T 16524 - 1996 光掩模对准标记规范
Specification for registration marks for photomasks
L95 GB/T 16528 - 1996 压敏电阻器用氧化锌陶瓷材料
Zinc oxide ceramics for use in varistors
L97 GB/T 13840 - 1992 晶片承载器
Wafer carriers
L97 GB/T 14276 - 1993 绕接工具总规范
Wire wrapping tools, General specification for
L97 GB/T 15394 - 1994 多探针测试台通用技术条件
General specification for probe tester
L97 GB/T 15861 - 1995 离子束蚀刻机通用技术条件
Genetic specification of ion beam etching system
L97 GB/T 15862 - 1995 离子注入机通用技术条件
Generic specification for ion implantation equipment
L97 GB/T 15870 - 1995 硬面光掩模用铬薄膜
Chrome thin films for hard surface photomasks
L97 GB/T 15871 - 1995 硬面光掩模基板
Hard surface photomask substrates
L97 GB/T 15872 - 1995 半导体设备电源接口
Power supply interface for semiconductor equipment
L97 GB/T 15873 - 1995 半导体设施接口技术文件编写导则
Directives for drafting semiconductor facilities inter-face specification
L97 GB/T 16878 - 1997 用于集成电路制造技术的检测图形单元规范
Specification for metrology pattern cells for integrated circuit manufacture
L97 GB/T 16879 - 1997 掩模曝光系统精密度和准确度的表示准则
Guidelines for precision and accuracy expression for mask writing equipment
L97 GB/T 16880 - 1997 光掩模缺陷分类和尺寸定义的准则
Guidelines for photomask defect classification and size definition
L99 GB/T 13947 - 1992 电子元器件塑料封装设备通用技术条件
General specification for electronic components plastic packaging equipments